| 摘要: |
| 针对某国产硅片在验证过程中的锥形缺陷，通过优化拉晶和制作工艺中的等待时间管控，减少硅片的缺陷，提升硅片的质量. |
| 关键词: 国产硅片 锥形缺陷 硅片磨边 等待时间 |
| DOI：10.3969/J.ISSN.1000-5137.2020.04.016 |
| 分类号:TN47 |
| 基金项目: |
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| The improvement of the cone defect of domestic silicon wafer |
|
LU Zhenjie, LI Jie, LANG Yuhong
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Engineering Ⅱ Division, Shanghai Huali Microelectronics Corporation, Shanghai 201203, China
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| Abstract: |
| The cone defects in the verification of domestic silicon wafer were focused and studied in the paper.By optimizing the control of the waiting time in pulling and producing during the silicon wafers process, the cone defects of silicon wafers were reduced and the quality of silicon wafer was greatly improved. |
| Key words: domestic silicon wafer cone defect silicon wafer edging waiting time |
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