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650 GHz蝴蝶结型波导探针设计
王博勋, 李尧, 陈敏然, 曹铎, 张毅, 刘锋, 石旺舟
上海师范大学 数理学院, 上海 200234
摘要:
设计了一种面向超导混频器的650 GHz蝴蝶结型波导探针.结合现有成熟的Si/SiO2衬底工艺,采用全高波导并结合背向短路腔体优化其特性.对波导探针进行了仿真与优化.结果表明,在620~680 GHz频段内,该波导探针的回波损耗低于8 dB,插入损耗低于8 dB;在650 GHz时低于14 dB,嵌入阻抗约为16 Ω,且平坦度良好,能满足实际应用需求.
关键词:  波导-微带转换  亚毫米波  超导混频器
DOI:10.3969/J.ISSN.1000-5137.2023.05.011
分类号:P 111
基金项目:国家自然科学基金(12073018, 12141303, 12373099, U1931205);上海市启明星计划(21QA1406800)
Design of a 650 GHz bow-tie shaped waveguide probe
WANG Boxun, LI Yao, CHEN Minran, CAO Duo, ZHANG Yi, LIU Feng, SHI Wangzhou
Mathematics and Science College, Shanghai Normal University, Shanghai 200234, China
Abstract:
A 650 GHz bow-tie shaped waveguide microstrip probe structure is proposed. The waveguide probe was designed using the existing mature Si/SiO2 substrate technology. Full-height waveguide and backshort cavity were used to optimize its characteristics. The structure was simulated and optimized. The results show that in the frequency range of 620-680 GHz, the return loss of the waveguide probe is less than 8 dB, the insertion loss is less than 8 dB, and even less than 14 dB at 650 GHz. The embedding impedance is about 16 Ω with good frequency independence. The proposed waveguide probe can meet the practical application requirements.
Key words:  waveguide-to-microstrip transition  submillimeter wave  superconducting mixer