| 摘要: |
| 发展环境友好的传感器、存贮器及换能器用铁电与压电薄膜是当前的研究热点之一.采用脉冲激光沉积 (PLD) 的方法,通过优化制备工艺,引入La0.6Sr0.4CoO3(LSCO)作为缓冲层,在Pt/Ti/SiO2/Si衬底上制备了准同型相界组分掺杂微量Mn元素的Bi0.5Na0.5TiO3-BaTiO334薄膜,并对其相结构、微观形貌、铁电、介电等性能进行了研究.结果表明：该薄膜具有纯钙钛矿结构,结构致密,显示出良好的电性能,其中剩余极化可达到1.15×10-1C·m-2,1 kHz下薄膜的相对介电常数约1000. |
| 关键词: 无铅薄膜 PLD 介电性 铁电性 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金(51071105,11204179) |
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| Fabrication and electrical properties of BNT-based lead-free ferroelectric thin film with the composition around the morphotropic phase boundary |
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JIN Chengchao, WANG Feifei, SHI Wangzhou, YAO Qirong
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College of Mathematics and Sciences,Shanghai Normal University
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| Abstract: |
| Development of ferroelectric and piezoelectric thin films for environmental friendly sensors,memories and transducers applications is one of the current hot research topics.In present work,La0.6Sr0.4CoO3-buffered Mn doped (Bi0.5Na0.5)TiO3-BaTiO3 thin film with the composition around the morphotropic phase boundary was grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition.Structure,ferroelectric and dielectric properties of the lead free thin film were systematically investigated.Results indicate that the film exhibites polycrystalline and dense microstructure.Good ferroelectric and dielectric properties with the average remnant polarization Pr of 1.15×10-1C/m2 and dielectric constant εT33/ε0 of about 1000 under 1 kHz are obtained. |
| Key words: lead-free thin film PLD dielectric ferroelectric |
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